Onto Innovation

Onto Innovation

ONTO· Manufacturing· Fiscal year ends in December

CEO pay in FY2025

Michael P. Plisinski is the CEO of Onto Innovation and was paid $7.8M in FY2025 (Dec), up 12%.

PayNo stock prices for these years
CEO pay is from each Onto Innovation proxy. The stock line is the value of $100 put in the stock at the start, from the price change of each fiscal year. Dividends are not in it.

Executives6

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  1. 1Michael P. PlisinskiFY2025
  2. 2Ido DolevFY2025
  3. 3Brian K. RobertsFY2025
  4. 4Mark R. SlicerFY2025
  5. 5Shirley ChenFY2025
  6. 6Ramil YaldaeiFY2025

Named executives and their total pay, from the Summary Compensation Table of the latest proxy.

Pay

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Onto Innovation paid its 6 named executives $21.6M in total in FY2025 (Dec). CEO Michael P. Plisinski was paid $7.8M of that.

Name
Michael P. PlisinskiChief Executive Officer
Ido DolevExecutive Vice President, Product Solutions GroupNot disclosedNot disclosed
Brian K. RobertsChief Financial OfficerNot disclosedNot disclosed
Mark R. SlicerFormer Senior Vice President, Chief Financial Officer
Shirley ChenSenior Vice President, Customer SuccessNot disclosedNot disclosed
Ramil YaldaeiChief Operating Officer

of each named executive, from the Summary Compensation Table of each proxy.

Peers17

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The FY2025 (Dec) proxy of Onto Innovation names 17 peer companies for pay. Pay versus performance data of Onto Innovation for that year is not on file, so it has no rank.

The comes from the company's proxy. CEO pay and of each company come from its own Pay versus Performance table for the same fiscal year.

Board5

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  • Christopher A. SeamsChair · 8 yr on the boardIndependentAudit—Paid as an executive
  • Christine A. TsingosDirector · 9 yr on the boardIndependentAudit (Chair)—Paid as an executive
  • David B. MillerDirector · 8 yr on the boardIndependentAudit—Paid as an executive
  • May SuDirector · 1 yr on the boardIndependent—Paid as an executive
  • Stephen D. KelleyDirector · 0 yr on the boardIndependent—Paid as an executive

The board of the latest proxy (FY2023).

Shared directors

Activity

  1. Pay
    Onto Innovation COO pay rose 18% to $1.7M in FY2025 (Jan).
    DEF 14A
  2. Pay
    Onto Innovation CEO pay rose 12% to $7.8M in FY2025 (Jan).
    DEF 14A
  3. Pay
    Onto Innovation Former CFO pay rose 69% to $2.9M in FY2025 (Jan).
    DEF 14A
  4. Pay
    Onto Innovation General counsel pay rose 18% to $1.1M in FY2022 (Dec).
    DEF 14A
  5. Pay
    Onto Innovation Division head pay rose 11% to $1.1M in FY2024 (Dec).
    DEF 14A
  6. Pay
    Onto Innovation COO pay rose 48% to $1.4M in FY2024 (Dec).
    DEF 14A
  7. Pay
    Onto Innovation CEO pay rose 23% to $7.0M in FY2024 (Dec).
    DEF 14A
  8. Pay
    Onto Innovation Former CFO pay rose 12% to $1.7M in FY2024 (Dec).
    DEF 14A
  9. Pay
    Onto Innovation General counsel pay rose 44% to $1.6M in FY2023 (Dec).
    DEF 14A
  10. Board
    Stephen D. Kelley joined the board of Onto Innovation. Stephen D. Kelley now sits on 2 public boards.
    3

Filings6

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Proxy statementDEF 14AApr 6, 2026FY2025
Annual report10-KFeb 24, 2026FY2025
Proxy statementDEF 14AApr 9, 2025FY2024
Annual report10-KFeb 25, 2025FY2024
Proxy statementDEF 14AApr 5, 2024FY2023
Annual report10-KFeb 26, 2024FY2023
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