Axcelis Technologies

Axcelis Technologies

ACLS· Manufacturing· Fiscal year ends in December

CEO pay in FY2025Stock +15.0% in FY2025

Russell J. Low is the CEO of Axcelis Technologies and was paid $5.1M in FY2025 (Dec), up 19%.

Pay$100 in the stock at the end of FY20 → $276
CEO pay is from each Axcelis Technologies proxy. The stock line is the value of $100 put in the stock at the start, from the price change of each fiscal year. Dividends are not in it.

Executives6

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  1. 1Russell J. LowFY2025
  2. 2James G. CooganFY2025
  3. 3Eileen J. EvansFY2025
  4. 4Christopher J. TatnallFY2025
  5. 5Gerald M. BlumenstockFY2025
  6. 6Gregory F. RedinboFY2025

Named executives and their total pay, from the Summary Compensation Table of the latest proxy.

Pay

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Axcelis Technologies paid its 6 named executives $12.9M in total in FY2025 (Dec). CEO Russell J. Low was paid $5.1M of that.

Name
Russell J. LowPresident and Chief Executive Officer
James G. CooganExecutive Vice President and Chief Financial Officer
Eileen J. EvansExecutive Vice President, HR and Legal, and General Counsel
Christopher J. TatnallExecutive Vice President, Global Customer Operations
Gerald M. BlumenstockExecutive Vice President, Research, Development, and Engineering
Gregory F. RedinboExecutive Vice President, Marketing and ApplicationsNot disclosed

of each named executive, from the Summary Compensation Table of each proxy.

Peers

No disclosed peer group

No proxy on file names a pay peer group for Axcelis Technologies. The peer group comes from the proxy statement, so it shows here when a proxy read has it.

Board1

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  • Greg GravesDirector · 1 yr on the boardIndependentAudit, Compensation (Chair)—Paid as an executive

The board of the latest proxy (FY2025).

Activity

  1. Pay
    Axcelis Technologies CEO pay rose 19% to $5.1M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  2. Pay
    Axcelis Technologies CFO pay rose 31% to $2.4M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  3. Pay
    Axcelis Technologies Division head pay rose 16% to $1.3M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  4. Pay
    Axcelis Technologies Division head pay rose 16% to $1.3M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  5. Pay
    Axcelis Technologies General counsel pay rose 83% to $1.6M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  6. Pay
    Axcelis Technologies Division head pay rose 16% to $1.3M. The stock rose 15% in FY2025 (Dec).
    DEF 14A
  7. Pay
    Axcelis Technologies CEO pay rose 183% to $4.1M. The stock rose 63% in FY2023 (Dec).
    DEF 14A
  8. Pay
    Axcelis Technologies CFO pay rose 23% to $1.8M. The stock fell 46% in FY2024 (Dec).
    DEF 14A
  9. Pay
    Axcelis Technologies Division head pay rose 24% to $1.1M. The stock fell 46% in FY2024 (Dec).
    DEF 14A
  10. Pay
    Axcelis Technologies Chair pay fell 29% to $3.0M. The stock rose 63% in FY2023 (Dec).
    DEF 14A
  11. Pay
    Axcelis Technologies CFO pay fell 32% to $1.2M. The stock rose 63% in FY2023 (Dec).
    DEF 14A

Filings6

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Proxy statementDEF 14AMar 31, 2026FY2025
Annual report10-KFeb 26, 2026FY2025
Proxy statementDEF 14AMar 31, 2025FY2024
Annual report10-KFeb 28, 2025FY2024
Proxy statementDEF 14AMar 29, 2024FY2023
Annual report10-KFeb 23, 2024FY2023
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