James G. Coogan

Executive Vice President and Chief Financial OfficeratAxcelis Technologies· In proxies 2023–2025

Pay in FY2025+31% from the year before · Axcelis Technologies stock +15.0% the same year

James G. Coogan was paid $2.4M in FY2025 (Dec), up 31%. Axcelis Technologies stock rose 15.0% that year.

Pay$100 in the stock at the end of FY22 → $101

Pay is from the Summary Compensation Table of each Axcelis Technologies proxy. The stock line is the value of $100 put in the stock at the start, from the price change of each fiscal year. Dividends are not in it.

Experience

ACLS
Axcelis TechnologiesPublic company · 3 yr
- Executive Vice President and Chief Financial Officer2023 – Present · 3 yrStock in role +44%

Roles come from the proxy statements of each company.

Activity

Pay
Axcelis Technologies CFO pay rose 31% to $2.4M. The stock rose 15% in FY2025 (Dec).
DEF 14AMar 31, 2026
Pay
Axcelis Technologies CFO pay rose 23% to $1.8M. The stock fell 46% in FY2024 (Dec).
DEF 14AMar 31, 2025

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