Axcelis Technologies: Executives
Russell J. LowPresident and Chief Executive OfficerFY2025
James G. CooganExecutive Vice President and Chief Financial OfficerFY2025
Eileen J. EvansExecutive Vice President, HR and Legal, and General CounselFY2025
Christopher J. TatnallExecutive Vice President, Global Customer OperationsFY2025
Gerald M. BlumenstockExecutive Vice President, Research, Development, and EngineeringFY2025
Gregory F. RedinboExecutive Vice President, Marketing and ApplicationsFY2025
6 executives

Named executives and their total pay come from the Summary Compensation Table of the latest proxy statement.