| Richard Wallace | President & Chief Executive Officer | FY2026 | |
| Bren Higgins | Executive Vice President & Chief Financial Officer | FY2026 | |
| Ahmad Khan | President, Semiconductor Process Control | FY2026 | |
| Brian Lorig | Executive Vice President, Global Support and Services | FY2026 | |
| Mary Beth Wilkinson | Executive Vice President, Chief Legal Officer & Corporate Secretary | FY2026 |
5 executives
Named executives and their total pay come from the Summary Compensation Table of the latest proxy statement.